Interpretable Geometry Sensitivity for Inverse Design of Integrated Photonics

As an increasingly powerful technique in integrated photonics, inverse design uses optimization algorithms to automatically create compact, high-performance photonic structures, often yielding non-intuitive layouts far more compact than conventional designs. While adjoint-based inverse design is a prominent optimization method, the resulting free-form layouts are difficult to interpret or diagnose under fabrication variability, even for experienced photonic device designers. We present an experimentally validated interpretability workflow that produces pixel-level sensitivity maps directly on the binary mask of an inverse-designed device. Using wavelength-division demultiplexers (WDMs) at 1310/1550 nm as examples, we train a lightweight convolutional surrogate to regress figures of merit (FoMs) and apply Integrated Gradients (IG) to attribute predicted transmission to individual pixels. We demonstrate that high-attribution hotspots correspond to physically meaningful substructures, such as splitter hubs and high-curvature edges. Experimental results show that controlled perturbations in these high-sensitivity regions result in up to an 11x higher excess insertion loss compared to perturbations in non-sensitive regions, consistent with full-wave simulations. This approach adds a practical explainability layer to existing pipelines, offering a clear pathway for foundry-compatible design-rule checking and fabrication-aware constraint allocation without modifying the underlying electromagnetic solver.