Electronic and photonic devices based on the two-dimensional material graphene have unique properties, leading to outstanding performance figures-of-merit. Mastering the integration of this new and unconventional material into an established semiconductor fabrication line represents a critical step for pushing it forward towards commercialization.
@article{arxiv.1912.04090,
title = {Integrating Graphene into Semiconductor Fabrication Lines},
author = {Daniel Neumaier and Stephan Pindl and Max C. Lemme},
journal= {arXiv preprint arXiv:1912.04090},
year = {2019}
}