Infrared vertically-illuminated photodiode for chip alignment feedback
Instrumentation and Detectors
2016-09-20 v1 Optics
Abstract
We report on vertically-illuminated photodiodes fabricated in the GlobalFoundries 45nm 12SOI node and on a packaging concept for optically-interconnected chips. The photodiodes are responsive at 1180 nm, a wavelength currently used in chip-to-chip communications. They have further a wide field-of-view which enables chip-to-board positional feedback in chip-board assemblies. Monolithic integration enables on-chip processing of the positional data.
Keywords
Cite
@article{arxiv.1606.08870,
title = {Infrared vertically-illuminated photodiode for chip alignment feedback},
author = {Luca Alloatti and Rajeev Jagga Ram},
journal= {arXiv preprint arXiv:1606.08870},
year = {2016}
}
Comments
7 pages, 4 figures