Infrared spectroscopy of hydrogenated and chlorinated amorphous silicon

S. Kalem; R. Mostefaoui; J. Bourneix; J. Chevallier

doi:10.1080/13642818608240664

Infrared spectroscopy of hydrogenated and chlorinated amorphous silicon

Materials Science 2021-10-11 v1

Authors: S. Kalem , R. Mostefaoui , J. Bourneix , J. Chevallier

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Abstract

The evolution is presented of infrared transmission spectra of hydrogenated and chlorinated amorphous silicon films versus the chlorine concentration and the annealing temperature. As the chlorine content increases, an increase of the 2100 cm-1 band intensity is observed. We associate this effect with the existence of SiH2CI2, mixed configurations. The Sic1 stretching band, located at 545 cm-1 in unannealed samples, shifts continuously up to 590 cm-1 as the annealing temperature increases. This displacement is attributed to a predominance of SiCI2, species around 500{\deg}C and their transformation to SiCl, species and SiCl, molecules above 700{\deg}C.

Keywords

hydrogenated amorphous silicon chlorinated amorphous silicon infrared spectroscopy annealing SiH2Cl2 SiCl stretching band

Cite

@article{arxiv.2110.03770,
  title  = {Infrared spectroscopy of hydrogenated and chlorinated amorphous silicon},
  author = {S. Kalem and R. Mostefaoui and J. Bourneix and J. Chevallier},
  journal= {arXiv preprint arXiv:2110.03770},
  year   = {2021}
}

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