Hot Electron Bolometer Development for a Submillimeter Heterodyne Array Camera

We are developing Nb diffusion-cooled Hot Electron Bolometers (HEBs) for a large-format array submillimeter camera. We have fabricated Nb HEBs using a new angle deposition process. We have characterized these devices using heterodyne mixing at 20 GHz. We also report on optimizations in the fabrication process that improve device performance.