High-Performance, High-Index-Contrast Chalcogenide Glass Photonics on Silicon and Unconventional Non-planar Substrates
Abstract
This paper reports a versatile, roll-to-roll and backend compatible technique for the fabrication of high-index-contrast photonic structures on both silicon and plastic substrates. The fabrication technique combines low-temperature chalcogenide glass film deposition and resist-free single-step thermal nanoimprint to process low-loss (1.6 dB/cm), sub-micron single-mode waveguides with a smooth surface finish using simple contact photolithography. Using this approach, the first chalcogenide glass micro-ring resonators are fabricated by thermal nanoimprint. The devices exhibit an ultra-high quality-factor of 400,000 near 1550 nm wavelength, which represents the highest value reported in chalcogenide glass micro-ring resonators. Furthermore, sub-micron nanoimprint of chalcogenide glass films on non-planar plastic substrates is demonstrated, which establishes the method as a facile route for monolithic fabrication of high-index-contrast devices on a wide array of unconventional substrates.
Keywords
Cite
@article{arxiv.1308.2749,
title = {High-Performance, High-Index-Contrast Chalcogenide Glass Photonics on Silicon and Unconventional Non-planar Substrates},
author = {Yi Zou and Danning Zhang and Hongtao Lin and Lan Li and Loise Moreel and Jie Zhou and Qingyang Du and Okechukwu Ogbuu and Sylvain Danto and J. David Musgraves and Kathleen Richardson and Kevin D. Dobson and Robert Birkmire and Juejun Hu},
journal= {arXiv preprint arXiv:1308.2749},
year = {2013}
}