Sample thickness is an important parameter in transmission electron microscopy (TEM) imaging, for interpreting image contrast and understanding the relationship between properties and microstructure. In this study, we introduce a method for determining thickness in scanning transmission electron microscopy (STEM) mode based on scanning moir\'e fringe (SMF). Sample thickness can be determined in situ in the medium magnification using focal-series SMF imaging, with beam damage and contamination avoided to a large extent. This method provides a fast and convenient way for determining thickness in TEM imaging, which is particularly useful for beam-sensitive materials such as Metal-Organic Frameworks.
@article{arxiv.2111.06746,
title = {Fast determination of thickness through scanning moir\'e fringe in scanning transmission electron microscopy},
author = {Pengfei Nan and Zhiyao Liang and Yue Zhang and Yangrui Liu and Dongsheng Song and Binghui Ge},
journal= {arXiv preprint arXiv:2111.06746},
year = {2021}
}