A scalable approach for integrated photonic networks in single-crystal diamond using triangular etching of bulk samples is presented. We describe designs of high quality factor (Q=2.51x10^6) photonic crystal cavities with low mode volume (Vm=1.062x({\lambda}/n)^3), which are connected via waveguides supported by suspension structures with predicted transmission loss of only 0.05 dB. We demonstrate the fabrication of these structures using transferred single-crystal silicon hard masks and angular dry etching, yielding photonic crystal cavities in the visible spectrum with measured quality factors in excess of Q=3x103.
@article{arxiv.1411.3639,
title = {Fabrication of Triangular Nanobeam Waveguide Networks in Bulk diamond Using Single-Crystal Silicon Hard Masks},
author = {I. Bayn and S. Mouradian and L. Li and J. A. Goldstein and T. Schröder and J. Zhang and E. H. Chen and O. Gaathon and M. Lu and A. Stein and C. A. Ruggiero and J. Salzman and R. Kalish and D. Englund},
journal= {arXiv preprint arXiv:1411.3639},
year = {2015}
}
Comments
This article will be published in Applied Physics Letters