Fabrication Development of a Large Area Grating for Out of Plane Beam Coupling
Optics
2020-10-08 v1 Applied Physics
Abstract
We develop a single-layer waveguide surface grating structure to vertically couple near infrared (NIR) light at ~1.55 um wavelength from a large area (~100 um length scale) Si waveguide on a Silicon-On-Insulator (SOI) substrates to free-space for high-power laser applications. Our design approach is based on the optimization of local emission angles and the out-coupling intensities. Simulation results show that a focal spot with a 1/e2 width of 3.82 um can be achieved at the desired focal position, with 33% (-4.81 dB) simulated source to free-space focusing efficiency, while initial measurements show an efficiency of 22% (-6.58 dB).
Keywords
Cite
@article{arxiv.2010.03435,
title = {Fabrication Development of a Large Area Grating for Out of Plane Beam Coupling},
author = {Jonathan Trisno and Tong Hua Lee and Parvathi Nair S. and You Sin Tan and Ray J. H. Ng and Yingyan Huang and Seng Tiong Ho and Joel K. W. Yang},
journal= {arXiv preprint arXiv:2010.03435},
year = {2020}
}