Evaluation of defect density by top-view large scale AFM on metamorphic structures grown by MOVPE

Agnieszka Gocalinska; Marina Manganaro; Valeria Dimastrodonato; Emanuele Pelucchi

doi:10.1016/j.apsusc.2015.05.070

Evaluation of defect density by top-view large scale AFM on metamorphic structures grown by MOVPE

Materials Science 2015-06-08 v1

Authors: Agnieszka Gocalinska , Marina Manganaro , Valeria Dimastrodonato , Emanuele Pelucchi

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Abstract

We demonstrate an atomic force microscopy based method for estimation of defect density by identification of threading dislocations on a non-flat surface resulting from metamorphic growth. The discussed technique can be applied as an everyday evaluation tool for the quality of epitaxial structures and allow for cost reduction, as it lessens the amount of the transmission electron microscopy analysis required at the early stages of projects. Metamorphic structures with low surface defectivities (below 106) were developed successfully with the application of the technique, proving its usefulness in process optimisation.

Keywords

atomic force microscopy defect density metamorphic structures MOVPE threading dislocations epitaxial quality

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@article{arxiv.1506.01967,
  title  = {Evaluation of defect density by top-view large scale AFM on metamorphic structures grown by MOVPE},
  author = {Agnieszka Gocalinska and Marina Manganaro and Valeria Dimastrodonato and Emanuele Pelucchi},
  journal= {arXiv preprint arXiv:1506.01967},
  year   = {2015}
}

Evaluation of defect density by top-view large scale AFM on metamorphic structures grown by MOVPE

Abstract

Keywords

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