Electron neutral collision frequency measurement with the hairpin resonator probe
Plasma Physics
2017-09-11 v1
Abstract
Electron neutral collision frequency is measured using both grounded and floating hairpin resonator probes in a 27 MHz parallel plate capacitively coupled plasma (CCP). Operating conditions are 0.1-2 Torr (13.3-267 Pa) in Ar, He, and Ar-He gas mixtures. The method treats the hairpin probe as a two wire transmission line immersed in a dielectric medium. A minimization method is applied during the pressure and sheath correction process by sweeping over assumed collision frequencies in order to obtain the measured collision frequency. Results are compared to hybrid plasma equipment module (HPEM) simulations and show good agreement.
Keywords
Cite
@article{arxiv.1703.09334,
title = {Electron neutral collision frequency measurement with the hairpin resonator probe},
author = {David J Peterson and Philip Kraus and Thai Cheng Chua and Lynda Larson and Steven C Shannon},
journal= {arXiv preprint arXiv:1703.09334},
year = {2017}
}
Comments
8 pages, 7 figures, Submitted to Plasma Sources Science and Technology