We investigate the performance of waveguide Bragg gratings as a function of imperfections introduced in the fabrication process. Effects of stitching errors introduced in the electron-beam and UV-lithography are discussed in details.
@article{arxiv.1110.6867,
title = {Effects of Lithographic Stitching Errors on the Performance of Waveguide Bragg Gratings},
author = {Steve Zamek and Mercedeh Khajavikhan and Dawn T. H. Tan and Maurice Ayache and Boris Slutsky and Yeshaiahu Fainman},
journal= {arXiv preprint arXiv:1110.6867},
year = {2011}
}