English

Effects of Lithographic Stitching Errors on the Performance of Waveguide Bragg Gratings

Optics 2011-11-01 v1

Abstract

We investigate the performance of waveguide Bragg gratings as a function of imperfections introduced in the fabrication process. Effects of stitching errors introduced in the electron-beam and UV-lithography are discussed in details.

Keywords

Cite

@article{arxiv.1110.6867,
  title  = {Effects of Lithographic Stitching Errors on the Performance of Waveguide Bragg Gratings},
  author = {Steve Zamek and Mercedeh Khajavikhan and Dawn T. H. Tan and Maurice Ayache and Boris Slutsky and Yeshaiahu Fainman},
  journal= {arXiv preprint arXiv:1110.6867},
  year   = {2011}
}

Comments

3 pages, 3 figures