Dynamic Imaging of Periodic Structures using Extreme Ultraviolet Scatterometry
Abstract
Dynamic scattering and imaging with coherent, ultrafast, extreme ultraviolet (EUV) light sources can resolve charge, phonon and spin processes on their intrinsic length and time scales. However, full field coherent diffraction imaging requires scanning of the sample combined with computational phase retrieval, making it challenging to quickly acquire a large series of dynamic frames. In this work, we demonstrate a technique for extracting dynamic 1D images of the average unit cell in a periodic sample from traditional EUV scatterometry data by analyzing the changing intensities of the far field diffracted orders. Starting from a system of equations relating small changes in far field diffraction to phase and amplitude perturbations at the sample plane, it is shown that under certain conditions, changes to the th diffracted order map exclusively onto the th Fourier component of the perturbation via a closed-form relation. We show through rigorous coupled-wave analysis simulations that our method can provide a good approximation even outside the scalar diffraction theory framework in which it is derived. Finally, we experimentally demonstrate this reconstruction method by exiting 1D nickel nanowires on a diamond substrate using an infrared laser pump pulse, and measuring their relaxation using a time-delayed EUV probe pulse, to visualize nanoscale phonon dynamics.
Cite
@article{arxiv.2512.19940,
title = {Dynamic Imaging of Periodic Structures using Extreme Ultraviolet Scatterometry},
author = {Brendan McBennett and Michael Tanksalvala and Emma E. Nelson and Theodore H. Culman and Yunhao Li and Jiayi Liu and Ethan Berk and Albert Beardo and James Harford and Justin Shaw and Henry C. Kapteyn and Margaret M. Murnane and Joshua L. Knobloch},
journal= {arXiv preprint arXiv:2512.19940},
year = {2025}
}