In this letter, we characterize the internal dissipation of coated micro-cantilevers through their mechanical thermal noise. Using a home-made interferometric setup, we achieve a resolution down to 1E-14m/rtHz in the measurement of their deflection. With the use of the fluctuation dissipation theorem and of the Kramers-Kronig relations, we rebuilt the full mechanical response function from the measured noise spectrum, and investigate frequency dependent dissipation as a function of the air pressure and of the nature of the metallic coatings. Using different thicknesses of gold coatings, we discuss the source of the internal viscoelastic damping.
@article{arxiv.1110.6629,
title = {Dissipation of micro-cantilevers as a function of air pressure and metallic coating},
author = {Tianjun Li and Ludovic Bellon},
journal= {arXiv preprint arXiv:1110.6629},
year = {2015}
}