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Digitally Programmable Higher-order Harmonic Generation Using Nonlinear MEMS Resonator

Applied Physics 2019-10-03 v1

Abstract

A fully electrically interfaced chip-scale Micro-Electro-Mechanical System based higher-order harmonic generator has multitudes of applications as it can simultaneously facilitate monolithic integration with on-chip electronics and offer microscopic footprint in comparison with the bulky and expensive high-order harmonic generation setup in optics. Here we report the first demonstration of a record-high harmonics generation over 100 tones using a thin-film Lead Zirconate Titanate flexural mode microresonator operating at CMOS compatible voltage levels. The harmonics can be befittingly controlled digitally post-fabrication as well.

Keywords

Cite

@article{arxiv.1910.00835,
  title  = {Digitally Programmable Higher-order Harmonic Generation Using Nonlinear MEMS Resonator},
  author = {Gayathri Pillai and Sheng-Shian Li},
  journal= {arXiv preprint arXiv:1910.00835},
  year   = {2019}
}
R2 v1 2026-06-23T11:32:30.651Z