Development and Application of a Diaphragm Micro-Pump with Piezoelectric Device
Abstract
In this study, a new type of thin, compact, and light weighed diaphragm micro-pump has been successfully developed to actuate the liquid by the vibration of a diaphragm. The micro-diaphragm pump with two valves is fabricated in an aluminum case by using highly accurate CNC machine, and the cross-section dimension is 5mm x 8mm. Both valves and diaphragm are manufactured from PDMS. The amplitude of vibration by a piezoelectric device produces an oscillating flow which may change the chamber volume by changing the curvature of a diaphragm. Several experimental set-ups for performance test in a single micro-diaphragm pump, isothermal flow open system, and a closed liquid cooling system is designed and implemented. The performance of one-side actuating micro-diaphragm pump is affected by the design of check valves, diaphragm, piezoelectric device, chamber volume, input voltage and frequency. The measured maximum flow rate of present design is 72 ml/min at zero total pump head in the range of operation frequency 70-180 Hz.
Cite
@article{arxiv.0802.3070,
title = {Development and Application of a Diaphragm Micro-Pump with Piezoelectric Device},
author = {H. K. Ma and B. R. Hou and H. Y. Wu and C. Y. Lin and J. J. Gao and M. C. Kou},
journal= {arXiv preprint arXiv:0802.3070},
year = {2008}
}
Comments
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)