Decentralized Motion and Resonant Damping Control for High-Bandwidth and Cross-Coupling Reduction in MIMO Nanopositioners
Abstract
Piezoelectric nanopositioning systems are widely used in precision applications that require nanometer accuracy and high-speed motion; however, lightly damped resonances and pronounced cross-axis coupling severely limit bandwidth and disturbance rejection. This paper presents a decentralized dual-loop control strategy for a two-axis nanopositioner, combining an inner non-minimum-phase resonant damping controller with an outer motion controller on each axis. The dominant diagonal resonance is actively damped to enable closed-loop bandwidths beyond the first structural mode, while a parallel band-pass damping path is specifically tuned to a higher-order resonance that predominantly affects the cross-coupling channels. Experimental results demonstrate that this targeted band-pass damping substantially reduces cross-axis coupling and enhances disturbance rejection, without compromising tracking accuracy.
Keywords
Cite
@article{arxiv.2601.11982,
title = {Decentralized Motion and Resonant Damping Control for High-Bandwidth and Cross-Coupling Reduction in MIMO Nanopositioners},
author = {Aditya Natu and Hassan HosseinNia},
journal= {arXiv preprint arXiv:2601.11982},
year = {2026}
}