Dark matter searches with a 13 meV threshold superconducting sensor array

Many well-motivated dark matter models predict meV-scale energy deposits in interactions with terrestrial experiments, but this regime is challenging to probe due to a lack of mature single-quantum detectors. Here we report results from QUALIPHIDE (QUAntum LImited PHotons In the Dark Experiment), a cryogenic dark matter search using a $41$-pixel array of energy-resolving microwave kinetic inductance detectors with a $13$ meV threshold, simultaneously used to look for both conversion photons from THz wavelength hidden photon dark matter and phonons from particle-like light dark matter interactions. The experimental design, with on- and off-focus pixels for the hidden photon search, allows for a data-driven background model, giving the experiment discovery potential. A blind analysis of $22$ hours of data shows no significant excess, setting the strongest constraints on the hidden photon kinetic mixing parameter $\chi$ over the mass range of $13$-$90$ meV/$c^2$, reaching $1.5\times10^{-12}$ at $50$ meV/$c^2$. These data also yield among the first terrestrial limits on dark matter scattering off nuclei and electrons, down to $5$ MeV/$c^2$ and $20$ keV/$c^2$, respectively. The low threshold also enables future study of the low-energy excess limiting cryogenic detectors and, as we project, will allow for a terahertz-scale QCD axion search with a magnetic field.