Construction and Characterization of a Frequency-Controlled, Picometer-Resolution, Displacement Encoder-Actuator

We have constructed an actuator/encoder whose generated displacement is controlled through the resonance frequency of a microwave cavity. A compact, 10-micrometer-range, digitally-controlled actuator executing frequency-coded displacement with picometer resolution is described. We consider this approach particularly suitable for metrologic-precision scanning probe microscopy.