In this chapter, silicon nanowires that are compatible with CMOS fabrication processes have been described. It has been shown that these nanowires can be functionalized by conjugating monoclonal antibodies to their surface in order to build sensitive biochemical sensors. It has also been shown that by using frequency-based signals, all the necessary components to interrogate these nanowires can be built on low-cost CMOS processes.
@article{arxiv.1302.5460,
title = {CMOS-Compatible Nanowire Biosensors},
author = {Thanh C. Nguyen and Wanzhi Qiu and Matteo Altissimo and Paul G. Spizzirri and Laurens H. Willems van Beveren and Efstratios Skafidas},
journal= {arXiv preprint arXiv:1302.5460},
year = {2013}
}