Chip-Based Laser with 1 Hertz Integrated Linewidth

Lasers with hertz-level linewidths on timescales up to seconds are critical for precision metrology, timekeeping, and manipulation of quantum systems. Such frequency stability typically relies on bulk-optic lasers and reference cavities, where increased size is leveraged to improve noise performance, but with the trade-off of cost, hand assembly, and limited application environments. On the other hand, planar waveguide lasers and cavities exploit the benefits of CMOS scalability but are fundamentally limited from achieving hertz-level linewidths at longer times by stochastic noise and thermal sensitivity inherent to the waveguide medium. These physical limits have inhibited the development of compact laser systems with frequency noise required for portable optical clocks that have performance well beyond conventional microwave counterparts. In this work, we break this paradigm to demonstrate a compact, high-coherence laser system at 1548 nm with a 1 s integrated linewidth of 1.1 Hz and fractional frequency instability less than 10$^{-14}$ from 1 ms to 1 s. The frequency noise at 1 Hz offset is suppressed by 11 orders of magnitude from that of the free-running diode laser down to the cavity thermal noise limit near 1 Hz$^2$/Hz, decreasing to 10$^{-3}$ Hz$^2$/Hz at 4 kHz offset. This low noise performance leverages wafer-scale integrated lasers together with an 8 mL vacuum-gap cavity that employs micro-fabricated mirrors with sub-angstrom roughness to yield an optical $Q$ of 11.8 billion. Significantly, all the critical components are lithographically defined on planar substrates and hold the potential for parallel high-volume manufacturing. Consequently, this work provides an important advance towards compact lasers with hertz-level linewidths for applications such as portable optical clocks, low-noise RF photonic oscillators, and related communication and navigation systems.