An On-Chip Quad-Wavelength Pyroelectric Sensor for Spectroscopic Infrared Sensing
Applied Physics
2019-08-28 v1 Materials Science
Abstract
Merging photonic structures and optoelectronic sensors into a single chip may yield a sensor-on-chip spectroscopic device that can measure the spectrum of matters. In this work, we propose and realize an on-chip concurrent multi-wavelength infrared (IR) sensor. The fabricated quad-wavelength IR sensors exhibit four different narrowband spectral responses at normal incidence following the pre-designed resonances in the mid-wavelength infrared region that corresponds to the atmospheric window. The device can be applied for practical spectroscopic applications such as non-dispersive IR sensors, IR chemical imaging devices, pyrometers, and spectroscopic thermography imaging.
Cite
@article{arxiv.1908.10002,
title = {An On-Chip Quad-Wavelength Pyroelectric Sensor for Spectroscopic Infrared Sensing},
author = {Thang Duy Dao and Satoshi Ishii and Anh Tung Doan and Yoshiki Wada and Akihiko Ohi and Toshihide Nabatame and Tadaaki Nagao},
journal= {arXiv preprint arXiv:1908.10002},
year = {2019}
}