English

3 kV Monolithic Bidirectional GaN HEMT on Sapphire

Applied Physics 2024-10-22 v1

Abstract

More than 3 kV breakdown voltage was demonstrated in monolithic bidirectional GaN HEMTs for the first time having potential applications in 1200V or 1700V-class novel power converters. The on resistance of the fabricated transistors was ~20 ohm.mm or ~11 mili ohm.cm^2. Breakdown voltage was optimized by utilizing two field plates in either side of the transistor and optimizing their geometry. Shorter first field plate lengths (less than 2 micron) resulted in higher breakdown voltage and the possible reason for this was discussed. The transistors had a steep subthreshold swing of 92 mV / dec. The on/off ratio was greater than 10^5 and it was limited by the tool capacity. The fabricated 3 kV transistor was benchmarked against the state-of-the-art monolithic bidirectional GaN HEMTs in the performance matrices of breakdown voltage and on resistance, that showed crucial progress.

Keywords

Cite

@article{arxiv.2410.16218,
  title  = {3 kV Monolithic Bidirectional GaN HEMT on Sapphire},
  author = {Md Tahmidul Alam and Swarnav Mukhopadhyay and Md Mobinul Haque and Shubhra S. Pasayat and Chirag Gupta},
  journal= {arXiv preprint arXiv:2410.16218},
  year   = {2024}
}

Comments

4 pages, 7 figures

R2 v1 2026-06-28T19:30:08.763Z